1/f-noise-free optical sensing with an integrated heterodyne interferometer
نویسندگان
چکیده
منابع مشابه
An Integrated Heterodyne Interferometer with on-chip Detectors and Modulators
The application of CMOS processing techniques developed in the microelectronics world to that of silicon photonics has been the catalyst for the rapid proliferation of smaller, higher performance, and more densely integrated photonic devices that are rapidly advancing the field with large-scale implementations of photonic systems. It is only logical that as the silicon photonics library continu...
متن کاملIntegrated heterodyne interferometer with on-chip modulators and detectors.
We demonstrate, to our knowledge, the first on-chip heterodyne interferometer fabricated on a 300-mm CMOS compatible process that exhibits root-mean-square (RMS) position noise on the order of 2 nm. Measuring 1 mm by 6 mm, the interferometer is also, to our knowledge, the smallest heterodyne interferometer demonstrated to date and will surely impact numerous interferometric and metrology applic...
متن کاملOptical mixing errors in a fiber-optic coupled heterodyne interferometer
A lightweight and electrically passive interferometer is demanded by a number of applications for precision metrology such as machine tool metrology and on-machine feedback [1]. To satisfy these requirements, a fiber-optic coupled heterodyne displacement measuring Michelson interferometer (FIDMI) shown in Fig.1 has been developed in the Center of Precision Metrology (CPM) at the University of N...
متن کاملHeterodyne interferometer with unequal path lengths
Laser interferometry is an extensively used diagnostic for plasma experiments. Existing plasma interferometers are designed on the presumption that the scene and reference beam path lengths have to be equal, a requirement that is costly in both the number of optical components and the alignment complexity. It is shown here that having equal path lengths is not necessary, instead, what is requir...
متن کاملError Analysis, Design and Modeling of an Improved Heterodyne Nano-Displacement Interferometer
A new heterodyne nano-displacement with error reduction is presented. The main errors affecting the displacement accuracy of the nano-displacement measurement system including intermodulation distortion error, cross-talk error, cross-polarization error and phase detection error are calculated. In the designed system, a He-Ne laser having three-longitudinal-mode is considered as the stabiliz...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Nature Communications
سال: 2021
ISSN: 2041-1723
DOI: 10.1038/s41467-021-22271-4